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5. OPERATING INSTRUCTIONS
5.1 MFC Operation
5.1.1 Start Up (Figure 12)
The main operating should perform in the Flow Readout Box. Valve Control Switches and flow setting
potentiometer are in the front of Readout Box panel, the flow setting internal or external signal control switches
are on the back of panel of Readout Box. When the switch is turned on the INT position, the potentiometer will
control flow rate; when the switch is turned on EXT position, the external signal will control flow rate (Please
check out the details in Flow Readout Box Instruction).
a. When valve switch is on the position of AUTO, gas supply should be open first and then turn on the power
supply, the flow rate will not be beyond 5% of presetting after flow soft-start about 20 seconds. General speaking
it should be warming up around 15 minutes in case valves shut off and gas flow cut off, after stable zero
movement, normal operation could begin. If there is big zero excursion, please see the reference 4.5, in the case
of non-gas flow, it’s better adjust zero by zero potentiometer.
b. If Valve switch is on the position of OFF, after power supplying, gas supplying and warming-up, turn switch to
AUTO position, flow rate will reach the presetting 2%(or lower) after a few seconds, which is the suggested
operating method.
Figure 12. Flow Readout Box Operating Panel
Flow Set potentiometer
Flow Display
Valve Drive Switch
Zero potentiometer
Flow Unit
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