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6.6 Pressure Resistance
Please be caution for the medium operating pressure of MFC, it should not be beyond the rage of specification of
inlet and outlet. Especially while operating under the high-pressure situation, the big differential pressure will
affect flow fail to shut off or lower adjustment. In case of using heavy flow rate of MFC, please be sure
appropriately widen tube and reduce gas internal resistance, if operating differential pressure is lower than the
value of request, it might could not be reach to the full scale flow rate value.
6.7 Calibration and Conversion
D07 series is calibrated by nitrogen. Other gas calibrations please inform while your order statements. When the
nitrogen calibration users use other gas operating, it could convert and calculate used gas flow rate by conversion
coefficient of appendix 9.1. Which means users could multiply the readout flow rate from MFC Flow Readout
box with the used gas corresponding conversion coefficient, the result will be the used gas corresponding mass
flow rate of standard situation.
For example, there is 100 SCCM (N2) calibrated MFC, the flow rate is displayed 86 SCCM while firedamp
flowing, the conversion coefficient of firedamp is 0.719 from reference of appendix 9.2, the real firedamp flow
rate is 86 × 0.719 which is 61.8 SCCM.
If users use the mixture gas, it could be calculated the conversion coefficient by the method which introducing in
appendix 9.2.
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