SevenStar D07 Series - D07-7 K, 7 KM Ordering Code

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6.8 D07-7K, 7KM Ordering Code
D07-[t] [g,g,g] [r,r,r,r] [f,f] [s] [m] [d]
[t] –Type Number
- [7K ] MFC
- [
7KM] MFM
[g,g,g] –Gas
Please consult SEMI52-0302
For Example:
-[ 013 ] N
2
-[ 007 ] H
2
-[ 000 ] Mixture gases (please consult [d] for detail)
[r,r,r,r] –Flow Range Full Scale
- [ 020C] 20SCCM
- [ 030C] 30SCCM
- [ 050C] 50SCCM
- [ 100C] 100SCCM
- [ 200C] 200SCCM
- [ 300C] 300SCCM
- [ 500C] 500SCCM
- [ 001L] 1SLM
- [ 002L] 2SLM
- [ 003L] 3SLM
- [ 005L] 5SLM
- [ 010L] 10SLM
- [ 000C] Customer Special Request (please consult [d] for detail)