SevenStar D07 Series - Page 35

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For Sevenstar MFC/MFM, the unit of SCCM is identical to “mL/min, 0 ºC ,1atm”, and the unit of SLM is
identical to “L/min, 0 ºC ,1atm”.
F.S: Full Scale
Table 2. Specification of D07-7KM Mass Flow Meter
NO. Item D07-7KM
1 Ranges of Flow ( 0~20,30,50,100,200,300,500) SCCM
( 0~1,2,3,5,10) SLM
2 Accuracy ± 1 % F.S
3 linearity ± 1 % F.S
4 Repeatability ± 0.2 %F.S
5 Response-Time
≤4 sec
6 Differential pressure <0.01 MPa
7 Temperature coefficient Zero: ≤±0.1% F.S./; Span: ≤±0.2% F.S./;
8 Max pressure 3 MPa
9 Operation temperature 5 ºC ~ 45 ºC
10 Setting/output signal
0 V ~ +5.00 V
(input resistance value 100K, output current 3mA)
11 Power supply
+15 V 50 mA
-15 V 50 mA
12 Dimensions
According to Figure 5
13 Weight 0.92 kg
The main specifications of D07 series could be found in table 1 and table 2. D07-7KM is the measuring part of
D07-7K.