Spectra Precision FOCUS 35 - Servo Focus Unit HA;VA collimation short range test

Chapter 6
Adjustment and Verification
Focus 30/35 Service Manual 6 - 8 P/N 79000035_SM, Version 1.5
Servo Focus Unit HA/VA collimation short range test
Performance
Fig. 6-5 Servo Focus Unit check specifications dialogue
Trouble shooting If one of the tests failed, check one of the following items:
- Check the cable connection.
- Check the movement of the spindle driving the focusing lens.
- Check the correct position of light barrier metal sheet, passing the
light barriers on the TSF board.
Item Performance Action Result Notes
1 Start up instrument /
PASS.
See “Connect to the Unit”
on page 7-3. how to set-up
the instrument.
2 Precondition HA/VA of reticle is in
tolerance, see page 6-12.
3 Preparation Mount a 1,5m Target in
direction of collimator
aiming.
Thin cross target in
1,5m +/-0,05m
Item Performance Description Result Notes
SFU control button