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Spectra Precision FOCUS 35 - Angle measurement system; Angle calibration and test

Spectra Precision FOCUS 35
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Chapter 6
Adjustment and Verification
Focus 30/35 Service Manual 6 - 142 P/N 79000035_SM, Version 1.5
Angle measurement system
Angle calibration and test
Tools and equipment
Angle calibration and test
The angle measurment system have to be calibrated running an automatic test sequence on horizontal
and vertical angle system. Completing the calibration, the angles system will be tested around the
circles. The test is checking the excentricity, cleanliness, amplitude and ambiguity of the sensor
signals. For each sensor (CIS0 and CIS1) of the diametral angle system, the signals will be tracked
separatly.
Performance
Description Part number
PASS Service software
Item Performance Action Result Notes
1 Start up instrument /
PASS.
See page 7-3 how to set-
up the instrument.
2 Start the Angle
calibration and test
software.
Select
Angle calibration
and test from Servo &
angle test
in Maintenance
& Service
, see Fig. 6-84 on
page 6-104 .
Check a sufficient
battery level of the
instrument >50%.
3 Initiate and calibrate
Hz/V angle system.
A. Select
Init and
calibrate Hz/V.
B. Select the
instruments axis Hz
and/or V angle.
C. Press the
Start button
to run the initiation
and calibration.
D. Check the diagrams
for evaluation. All
values on Result/
Status have to be
marked with green
after a sucessful test
run.
The measure
results will be
shown by axis
Hz and V on
three diagrams
for:
- Excentricity
- Amplitude
-Ambiguity
The calibration
values shown on
Results/Status
will be stored to
the instrument.
The calibration
procedure for both
axis needs appr. 1
minute and further 2
minutes for a
complete test back
and forth after
calibration.

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