3.
Using the HDV system, measure the position of fiducials spaced every 30 mm. For each
fiducial, take the average of multiple readings for improved accuracy.
4.
Calculate the absolute measurement error for each fiducial by subtracting the calibrated
position of the fiducial from the above average readings, then
5.
Verify that the calculated absolute X measurement errors are within the HDV system
accuracy specification, which is E1 = 3.0 µm + 1 µm x L/(33 mm).
6.
Repeat for the Y axis.
7.
Enter the absolute X and Y errors on an X-Y Axes Accuracy Validation Results Plot, as
shown below. In this plot, the straight line defined by blue diamonds is the maximum error
specified by 3.0 µm + 1 µm x L/(33 mm). The green squares
■
are the absolute X errors. The
red triangles
▲
are the Y errors. The HDV system is within the factory calibration spec if all X
and Y errors fall below the straight line.
Figure 18. Sample Accuracy Validation Results Plot
6.7 Cleaning
To the degree possible, the system should be kept in a clean environment, away from dirt, dust,
oil and debris which could affect system performance or degrade the system’s mechanical and
electronic parts. If a clean environment is not available, the machine should be kept as clean and
protected as is possible. In harsh environments, preventive maintenance and factory service
should be scheduled more frequently to keep the system in top working order.
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