set mode.
p :mantissa of SP1L
s :sign of SP1L 0:□-□ or 1:□+□
e :exponent of SP1L
P :mantissa of SP1H
S :sign of SP1H 0:□-□ or 1:□+□
E :Exponent of SP1H
Note: ppse must be no larger than PPSE,
otherwise or the invalid value causes data
error “003” Note: The setpoint value must
be between 1.0E-9 and 9.9E3(Torr or
mbar), or 1.0E-7 and 9.9E5(Pa)