Ulvac PMB-040C - Page 19

YK10-0015-DI-002-03
Contents-2
4.2.1 Test run ..................................................................................................................................... 29
4.2.2 Exhaust start ............................................................................................................................. 30
4.3 Exhaust stop/Operation Stop .......................................................................................................... 30
5. Maintenance and Check ...................................................................................................................... 32
5.1 Maintenance ................................................................................................................................... 32
5.2 Regular Check ................................................................................................................................ 32
5.2.1 Pump oil level check................................................................................................................. 33
5.2.2 Pump oil check ......................................................................................................................... 33
5.2.3 Replacement of pump oil ......................................................................................................... 33
5.2.4 Oil leakage check ..................................................................................................................... 35
5.2.5 Checking mechanical seal for oil leakage ................................................................................ 35
5.2.6 Checking cooling water ............................................................................................................ 35
5.2.7 Checking wire net at air intake ................................................................................................. 35
5.2.8 Checking abnormal noise/vibration .......................................................................................... 35
5.2.9 Checking inside of casing ........................................................................................................ 36
5.3 Checkup after Storage for a Long Period ....................................................................................... 36
5.4 Overhaul ......................................................................................................................................... 36
5.5 Trouble shooting ............................................................................................................................. 37
6. Removal / Transport ............................................................................................................................. 41
6.1 Operation Procedure ...................................................................................................................... 41
7. Disposal ................................................................................................................................................ 42
8. Warranty Clauses ................................................................................................................................. 43
8.1 Warrantable Items........................................................................................................................... 43
8.2 Duration of Guarantee .................................................................................................................... 43
8.3 Warrantee Scope ............................................................................................................................ 43
8.4 Response Procedure ...................................................................................................................... 43
8.5 Disclaimer ....................................................................................................................................... 44
8.6 Others ............................................................................................................................................. 44
9. Main Displacement Parts ..................................................................................................................... 45
APPENDIX 1 TECHNICAL NOTE ............................................................................................................ 46
APPENDIX 1.1 Designing Pumping System ........................................................................................ 46
APPENDIX 1.2 Automatic Operation .................................................................................................... 47
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