Ulvac PMB-040C - 5 Maintenance and Check; Maintenance; Regular Check

YK10-0015-DI-002-03
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5. Maintenance and Check
5.1 Maintenance
Conduct the maintenance regularly in appropriate check interval. Maintenance period shall differ
depending on the operation purpose. Set the interval once a day at first. Once a week from next
week if you had no problem, then conduct once a month for example. We recommend you, however,
to conduct visual checks and check on the utility every day to see the system condition.
You should check following points at least once per three days while you continue operation. In the
high load operating (Includes the operation at 400Pa～maximum inlet pressure), raise the
frequency of confirmation.
(1) Whether the amount of oil in the vacuum pump within the appropriate range.
(2) Whether the Vacuum pump oil is discolored or not.
(3) Whether there is no oil leak from the pump.
(4) Whether there is no oil leak from the Mechanical seal.
(5) Whether the cooling water flows by specified volume.
(6) Whether there is no water leak.
(7) Whether there is no foreign noise.
(8) Whether there is anything strange in the Motor current value.
5.2 Regular Check
Although you have to consider checkpoints depending on the use of the Pump, you should check
the following regularly; it is helpful to avoid trouble and extend the pump life cycle.
WARNING
●Check before operation that all dangerous energy supplies are shut off
before operation.
●Never turn on the power supply during the check. Otherwise you may
get injured.
●The pump temperature is high immediately after it stops. Wait for a
while before checking the level until the pump temperature decreases.
Otherwise you may get burned.