Ulvac PMB-040C - Caution High Temperature; Caution Leakage of Hot Cooling Water

YK10-0015-DI-002-03
3
1.1.5 Caution High temperature
Factors Avoidance methods and measures
Getting burnt on touching the
high temperature part.
●The Pump gets high temperature during
operation.
●As the surface temperature is high, you
have a risk of getting burnt by
accidentally touching it with the hand or
the like. Refrain from touching the pump
during operation. Wait until the
temperature sufficiently cools down
after having stopped the pump to
conduct check or something.
1.1.6 Caution Leakage of hot cooling water
Factors Avoidance methods and measures
Kept operating without supplying
the cooling water. Boiled hot
vapor jet out the cooling water
outlet.
●Put a Flow meter in the line to set the
interlock so that the Pump stops when
cooling water was blocked out.
●If you kept operating without supplying
the water, immediately stop the Pump
and keep away from it.
●Stop the Pump and ensure that the
Pump temperature got cooled down to
take out the Pump and check it.