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Ulvac PMB-040C - Safety Precautions

Ulvac PMB-040C
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YK10-0015-DI-002-03
iii
Training for the electrical safety is required as there is a risk of
electrical shock.
Check and ensure that the pump is sufficiently cooled down as this
section keeps high temperature after having stopped the pump.
0.3 Safety Precautions
Descriptions are given as the method to keep away from danger and actions that must be restricted
on the use of the product.
Use of this product and this Instruction Manual.
IMPORTANT
Please read this Instruction Manual before starting installation,
operation check or maintenance of this product to use it in long term.
You are requested to fully understand the safety precautions,
specifications and operation methods of the product.
DANGER
Toxic and combustible/combustion-supporting gases other than inert
gas cannot be used as they leak from the pump body when evacuated
by a vacuum pump.
DANGER
Combustible/Combustion-supporting gases and materials other than
inert gas cannot be used as they ignite/explode in a vacuum pump
when evacuated by the vacuum pump.
DANGER
Corrosive gas other than inert gas cannot be used as pump
components may be corroded and damaged when evacuated by a
vacuum pump.
DANGER
Pump oil as well as the pump unit becomes toxic should the toxic gas
was sucked in the vacuum pump. Pay attention to execute
maintenance work.

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