YK10-0015-DI-002-03
14
3.3 Inlet port Piping/ Outlet port Piping
(1) Wash sufficiently inside the Vacuum chamber, pipes, Vacuum valve and so on to connect them
to the Pump. If dirty unit were connected, it would cause a trouble such like raise the ultimate
pressure or extend the depression time to the specified pressure. Wear a pair of gloves to
touch any vacuum section. Do not touch with the bare hand.
(2) Pay attention not to give damage to the Flange sheet face, Gasket slot or gasket itself.
3.3.1 Inlet port Piping
JIS B 2290:1998 Vacuum technology-Flange dimensions;
Attachment book (Reference) Flange dimensions for maintenance
(1) Use the JIS vacuum flange (VF250) to connect the pipe to the inlet of PMB-040C.
Use the JIS vacuum flange (VF300) to connect the pipe to the inlet of PMB-060C.
(2) Use a pipe with bellows so as not to transfer the pump vibration to the Vacuum chamber.
(3) Put the Vacuum valve, Vacuum gauge and Leak valve between the Vacuum chamber and the
Pump
3.3.2 Outlet port Piping
JIS B 2290:1998 Vacuum technology-Flange dimensions;
Attachment book (Reference) Flange dimensions for maintenance
(1) Use the JIS vacuum flange (VG150) to connect the pipe to the outlet of PMB-040C.
Use the JIS vacuum flange (VG200) to connect the pipe to the outlet of PMB-060C.
(2) Put a pipe having bellows between the backing pump and outlet of the PMB-040C/PMB-060C.
(3) Do not connect directly the backing pump inlet with the outlet of the PMB-040C/PMB-060C.
DANGER
●Toxic and combustible/combustion-supporting gases other than inert
gas cannot be used as they leak from the pump body when evacuated
by a vacuum pump.
DANGER
●Combustible/Combustion-supporting gases and materials other than
inert gas cannot be used as they ignite/explode in a vacuum pump
when evacuated by the vacuum pump.
DANGER
●Corrosive gas other than inert gas cannot be used as pump
components may be corroded and damaged when evacuated by a
vacuum pump.
To Next Page
Loading...
