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Ulvac PMB-040C - Exhaust Start; Exhaust Stop;Operation Stop

Ulvac PMB-040C
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YK10-0015-DI-002-03
30
4.2.2 Exhaust start
(1) Flow the Cooling water.
(2) Close the main valve of the Mechanical booster pump and start running the backing pump to
exhaust inside pipes.
(3) Open the mechanical pump on the suction side of the mechanical booster pump, and exhaust
inside the vacuum vessel.
(4) Start the operation upon the vacuum chamber was exhausted to the pressure lower than the
maximum inlet pressure of the Mechanical booster pump.
4.3 Exhaust stop/Operation Stop
WARNING
Ensure to flow the cooling water with the specified volume. Lack of
the cooling water might give damage to the Pump unit or evaporate
the water remained in the Pump to raise the pressure inside the
Cooling system resulting in accidentally jetting out the hot steam.
The vacuum pump becomes high temperature during operation. Do
not touch the Motor and/or Pump unit until the Pump cools down
after having stopped operation. Apply an appropriate protection to
avoid to touch the surface as necessary.
However, if the environment was highly humid, keep the mechanical
booster pump warmer than the room temperature after having
stopped it and make the atmospheric pressure inside the pump.
Water in the air might condense in the pump and worsen the ultimate
pressure and/or pumping speed.
CAUTION
Be sure to close the vacuum valve and stop the Pump operation to
open the Leak valve. Failure to follow this operation might cause the
oil invasion in the casing from the lubrication chamber or otherwise
give damage to the Pump. Further the oil might flow back to the
Vacuum tank if used the oil rotation pump as the Supplementary
pump.
If failed in closing the Vacuum valve, the vacuum might leak from the
Exhaust system through the Pump.
CAUTION
If there are valves on the side of the air intake or exhaust ports of the
mechanical booster pump, you can close these valves to keep the
inside of the mechanical booster pump in a vacuum.

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