Ulvac PMB-040C - Trouble Shooting

YK10-0015-DI-002-03
37
5.5 Trouble shooting
Table. 6 Troubleshooting
Trouble Causes Processing Method Reference
The pump
does not
rotate
1 Abnormal phase voltage.
Are all three phases of power supply
normal?
Check the power supply.
3.5
2 Motor connection is wrong. Check the connection. 3.5
3
Safety circuit such as the
NFB and Electromagnetic
breaker are not correctly set.
Make the Safety circuit conform to
the Motor specification.
3.5
4
Are the no-fuse breaker and
electromagnetic switch
normal?
Failure of safety circuit.
Check the no-fuse breaker and
electromagnetic switch.
3.5
5
Are the no-fuse breaker and
electromagnetic switch
normal?
Trip of safety circuit.
Remove the cause by which the
safety circuit has tripped, and then
press the reset button.
Check whether or not the set value
of the safety circuit is appropriate.
3.5
6
The motor pulley and the
pump pulley are not rotating.
Check whether electricity is coming. 3.5
7
Run only by the Motor.
Is the Rotation and/or current
value correct?
Check motor
Replace the Motor
3.5
8
Lubricating oil is below the
level line.
Check for oil flow into the rotor
casing.
Replenish oil.
3.6
9
Oil viscosity got higher.
Lubricant oil discolored.
Change oil. 3.6
10 The belt is loosening. Re-tighten the belt. 3.8
11 Is the rotor rotating smoothly?
Disassemble and repair the pump.
(Cleaning and clearance
adjustment)
5.2
5.4
12
Foreign substance entered in
the pump, and the surface of
the rotor was scratched.
Conduct the overhaul (replacement
of the Casing, Rotor, Cover and so
on.)
5.2
5.4
13
Reactive agent accumulated
inside the Pump while the
Pump was stopped after
having exhausted the
reactive gas.
Conduct the overhaul (cleaning
inside the Pump, removal of
reactive agent and so on.)
5.2
5.4
14 The pulley key is loosening. Correct the loosening.
5.2
5.4
15
Is operating pressure
appropriate?
Pressure is above the
maximum pumping pressure.
Check pressure on intake and
exhaust sides.
Check the backing pump.
2.2
2.4
16
Is the rotor rotation resisted?
Rotors do not rotate by
inertia.
Overhaul
5.2
5.4