YK10-0015-DI-002-03
38
Trouble Causes Processing Method Reference
The
pressure
does not
decline, and
the pumping
speed is
slow.
1
There is a leak in the pipe
connecting with the Pump.
Use a Leak detector or the like to
find out the leak position and stop it.
3.3
2
Pressure measurement
method is wrong.
Measure correctly the pressure. －
3
Vacuum gauge is not
appropriate.
Use the Vacuum gauge that
matches the measurement pressure
range and correctly calibrated one
to measure the pressure.
－
4 Leak valve is open Close the valve. 3.3
5
Motor rotation direction is
reverse.
Do the connection again to correct
the rotation direction.
3.5
6
The application frequency of
the motor pulley does not
accord with power supply
frequency.
Replace with a motor pulley of
appropriate frequency.
0.5.1
7
Metal mesh at the Suction
inlet is clogged.
Remove the pipe above the inlet
and wash the mesh.
5.2
8
Pump exhaust capacity is
smaller compared to the
Vacuum chamber capacity.
Select another Pump type. 2.2
9
Pipe connected to the Suction
inlet is thin or connection
distance is long.
Connect a pipe wider than inlet
diameter and shorten the
connection distance between the
Vacuum chamber.
－
10
Casing inside and/or the
Rotor surface is dirty / wet.
There are attached
substances, or wet.
Overhaul（Cleaning, clearance
adjustment）
5.4
11
Mechanical seal
Air leak
Replace the Mechanical seal. 5.4
12
Is the ultimate pressure of
backing pump normal?
Pressure is above the
prescribed value.
Change the backing pump oil. 2.2
13
Coolant is not circulating. Confirm that coolant is flowing. 3.4
14
Oil is deteriorating, smearing.
a. Water system is being
exhausted.
b. Dust is being suctioned.
c. Solvent vapor is being
suctioned.
d. Foreign object enters in.
Replace with new oil.
Overhaul (Inside cleaning)
a. Put the trap into the front stage
of the pump.
b. Put filters/traps into the front
stage of the pump.
c. Put the trap by use application
into the front stage of the pump.
d. Put filters into the front stage of
the pump.
3.6
15
New oil pump was just
entered.
Perform no-load operation for a
while.
3.6
16
Not using the ULVAC genuine
oil.
Conduct the overhaul of the Pump
and replace the oil with the ULVAC
oil.
3.6
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