YK10-0015-DI-002-03
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CAUTION
●Read “1. 2 Chemical Material Safety Data Sheet” previously before
starting lubrication.
Please obtain the latest version of Material Safety Data Sheet (SDS)
from our Sales Department.
●Weal protective gears such as rubber gloves, protective goggle and
so on.
Should the oil touched to your hand are entered in your eye,
immediately follow the emergency treatment described on the SDS.
CAUTION
●Ensure to use the vacuum pump oil designated by ULVAC.
Operation using oil other than designated shall be out of our scope
of guarantee as it might impair the pump performance and shorten
the life cycle.
CAUTION
●To lubricate, be sure to stop running the pump and return the
Mechanical booster inside to the atmospheric pressure.
Chamber containing the oil becomes vacuum during operation.
Taking off the plug during operation would cause a large leak and
give damage to the Pump unit.
CAUTION
●Running the unit with the lubrication filled over the upper limit on
the room temperature (around 20℃) might cause the oil flowing in
the casing. Discharge the oil if over lubricated so as to match the
upper level.
●Be sure to check the oil level under operation stop on the room
temperature (around 20℃.)
Oil level might get higher during operation due to the oil
temperature rise and oil rowing, but it makes no problem.
CAUTION
●Note to purge the oil to transfer the pump. If forced to transfer
remaining the oil, be sure to keep the pump horizontal. Do not tilt
the pump 10 degree or more while you charge the oil. The oil might
run into the casing.
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