YK10-0015-DI-002-03
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CAUTION
●Ensure to use the vacuum pump oil designated by ULVAC.
Operation using oil other than designated shall be out of our scope
of guarantee as it might impair the pump performance and shorten
the life cycle.
CAUTION
●When newly filling the mechanical booster pump with lubrication oil
or leaving the mechanical booster pump for a long time with
lubrication oil remaining inside, be sure to perform deaeration of
lubrication oil before operation.
If you operate this product without deaeration of the lubrication oil,
a large amount of bubbles may occur and enter the casing.
●Before pouring oil, be sure to stop the pump and set the inside of
the mechanical booster pump to the atmospheric pressure.
The place in which there is the lubrication oil is in a vacuum. If the
filler plug is removed during the operation, a large amount of
leakage occurs, causing a failure in the pump.
CAUTION
●Depending on the use conditions, the pump oil may deteriorate in a
extremely short period of time.
It is recommended to perform the first replacement of the pump oil
within ten days and, after checking the degree of contamination of
oil, decide the oil replacement cycle.
Proceed as follows (Refer to “3.6 Lubrication”).
(1) Shut down the pump and open the drain port to drain the oil in the Lubrication chamber.
Upon completion of draining the oil, close the drain port again and run the pump under no load
for approx. 5 seconds to drain the oil adhered to the pump parts.
(2) Close the drain port and fill fresh oil through the oil filling port.
Pour oil until the oil level comes the upper line of the oil level gauge.
(3) If the oil is severely contaminated, fill fresh oil and run the pump for several minutes under no
load to clean the pump interior. Repeat this operation several times depending on the degree of
oil contamination.
(4) After changing the oil with fresh oil, run the pump to warm it up and then check the ultimate
pressure.
(5) If the specified ultimate pressure cannot be attained by oil change, sludge or other deposit may
have collected on the bottom of the pump case. In that event, overhaul is required. Contact
your local ULVAC organization or representative.