Ulvac VD30C - Page 20

YK15-0009-DI-002-04
Contents-2
4.3 Operation Stop ................................................................................................................................ 27
4. 4 Gas Ballast Function ..................................................................................................................... 28
The ............................................................................................................................................................ 29
4. 5 Vacuum Pump Oil For cold district ................................................................................................ 29
4.6 Oil mist trap (Optional) .................................................................................................................... 30
5. Maintenance and Check ...................................................................................................................... 31
5.1 Maintenance ................................................................................................................................... 31
5.2 Regular Check ................................................................................................................................ 32
5.2.1 Pump Oil Level Check .............................................................................................................. 33
5.2.2 Vacuum Pump Oil Check ......................................................................................................... 33
5.2.3 Replace Vacuum Pump Oil ...................................................................................................... 35
5.2.4 Oil Leak Check ......................................................................................................................... 36
5.2.5 Checking Gas Ballast Function ................................................................................................ 36
5.2.6 Checking Metal Mesh at the Suction Inlet ............................................................................... 36
5.2.7 Checking Noise and Abnormal Vibration ................................................................................. 36
5.2.8 Checking Coupling and Spider................................................................................................. 37
5.2.9 Checking Oil Mist Trap (option) ................................................................................................ 38
5.2.10 Checking drain valve .............................................................................................................. 38
5.3 Checkup after storage for a long period ......................................................................................... 39
5.4 Overhaul ......................................................................................................................................... 39
5.5 Trouble shooting ............................................................................................................................. 40
6. Removal / transport .............................................................................................................................. 47
6.1 Operation procedure ....................................................................................................................... 47
7. Disposal ................................................................................................................................................ 48
8. Warranty Clauses ................................................................................................................................. 49
8.1 Warrantable Items .......................................................................................................................... 49
8.2 Duration of guarantee ..................................................................................................................... 49
8.3 Warrantee scope ............................................................................................................................ 49
8.4 Response procedure ...................................................................................................................... 49
8.5 Disclaimer ....................................................................................................................................... 50
8.6 Others ............................................................................................................................................. 50
9. Main Replacement Parts ...................................................................................................................... 51
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