Ulvac VD30C - Page 21

To Next Page

To Previous Page

YK15-0009-DI-002-04

Contents-3

Tables and Illustrations

Fig. 1 Warning Label ................................................................................................................................... x

Fig. 2 Warning Label replacement .............................................................................................................. x

Fig. 3 Location of vacuum pump in host device ......................................................................................... 8

Fig. 4 Dimensional drawing VD30C, VD30C-A .......................................................................................... 9

Fig. 5 Dimensional drawing VD40C, VD40C-A .......................................................................................... 9

Fig. 6 Dimensional drawing VD60C ......................................................................................................... 10

Fig. 7 Dimensional drawing VD90C ......................................................................................................... 10

Fig. 8 Dimensional drawing VD30C-H, VD30C-B ..................................................................................... 11

Fig. 9 Dimensional drawing VD40C-H, VD40C-B ..................................................................................... 11

Fig. 10 Dimensional drawing VD60C-H.................................................................................................... 12

Fig. 11 Dimensional drawing VD90C-H .................................................................................................... 12

Fig. 12 Pumping speed curves - MODEL VD30C/VD40C ....................................................................... 14

Fig. 13 Pumping speed curves - MODEL VD60C/VD90C ....................................................................... 14

Fig. 14 Lubrication and oil level indication ............................................................................................... 17

Fig. 15 Connection to vacuum chamber (example) ................................................................................. 18

Fig. 16 Recommended connection diagram ............................................................................................ 20

Fig. 17 Electrical wiring diagram .............................................................................................................. 20

Fig. 18 Installation example VD90C ......................................................................................................... 30

Fig. 19 Replacement of coupling spider ................................................................................................... 37

Fig. 20 Exploded perspective view ........................................................................................................... 51

Table. 1 standard accessories .................................................................................................................... xi

Table. 2 Details model list ........................................................................................................................... 5

Table. 3 Optional specifications and gasket material/oil type comparison table ........................................ 5

Table. 4 Specifications ................................................................................................................................ 7

Table. 5 Rated current value of the standard motor ................................................................................. 23

Table. 6 Recommended replacement cycle of the vacuum pump oil ...................................................... 33

Table. 7 Troubleshooting .......................................................................................................................... 40

Table. 8 Parts list ...................................................................................................................................... 52

Table. 9 Main replacement parts list (VD30C/VD40C) ............................................................................. 53

Table. 10 Main replacement parts list (VD60C/VD90C)........................................................................... 54

Table. 11 Making format for names and contents of hazardous substances or elements ......................... A