Ulvac VD30C - Page 64

YK15-0009-DI-002-04
43
Trouble Causes Processing Method Reference
The
pressure
does not
decline, and
the
Pumping
speed is
slow.
1
Pump exhaust capacity is
smaller compared to the
Vacuum chamber
capacity.
Select another Pump type. 2
2
Pressure measurement
method is wrong.
Measure correctly the pressure. 2.5.1
3
Vacuum gauge is not
appropriate.
Use the Vacuum gauge that
matches the measurement
pressure range and correctly
calibrated one to measure the
pressure.
2.5.1
4
Pipe connected to the
Suction inlet is thin or
connection distance is
long.
Connect a pipe wider than inlet
diameter and shorten the
connection distance between
the Vacuum chamber.
3.3
2.5.1
5
Metal mesh at the inlet is
clogged.
Remove the pipe above the inlet
and wash the mesh.
4.1
5.2.6
6
The oil is not supplied by
the specified volume.
Control the oil level.
Supply the oil by the specified
volume.
Conduct the overhaul.
(Replacement of the Pump part)
3.2
5.2.1
5.2.2