Ulvac VD30C - Page 65

YK15-0009-DI-002-04
44
Trouble Causes Processing Method Reference
The
pressure
does not
decline, and
the
Pumping
speed is
slow.
7
Oil is dirty.
a. Water is being
suctioned.
b. Dust is being suctioned.
c.
Solvent vapor is being
suctioned.
d. Foreign substance
enters in.
Replace with new oil.
Conduct the overhaul.
(Inside cleaning)
a. Put the trap into the front stage
of the Pump.
b. Put filters/traps into the front
stage of the Pump.
c. Put the trap by use application
into the front stage of
the
Pump.
d. Put filters into the front stage
of the Pump.
3.2
5.2.1
5.2.2
8
There is a leak in the pipe
connecting with the Pump.
Use a Leak detector or the like
to find out the leak position and
stop it.
3.3
9
Not using the ULVAC
genuine oil.
Conduct the overhaul of the
Pump and replace the oil with
the ULVAC oil.
3.2
5.2.1
5.2.2
10
New oil pump was just
entered.
Perform no-load operation for a
while.
-
11 Leak valve is open Close the valve. 3.3
12
Motor rotation direction is
reverse.
Do the connection again to
correct the rotation direction.
3.5
13
The oil is not circulating.
a. Oil pit of the Cover or
the like is clogged.
b. Oil distributor valve has
a trouble.
Conduct the overhaul.
a. Clean the oil pit.
b. Check and repair the Oil
distributor valve.
5.4
14
Water entered inside the
Pump.
Replace the oil.
3.2
5.2.1
5.2.2