Ulvac VD30C - Page 66

YK15-0009-DI-002-04
45
Trouble Causes Processing Method Reference
Abnormal
heating
1
Keeping continuous
operation under high
suction pressure.
Pump surface temperature
would rise up around 100℃ on
continuous operation under high
suction pressure.
4
4.1
4.2
4.3
2
The oil is not supplied by
the specified volume.
Control the oil level.
Supply the oil by the specified
volume.
3.2
3 Oil is dirty.
Replace with new oil.
Conduct the overhaul.
(Inside cleaning)
3.2
5.2.1
5.2.2
4
Suction gas is hot. Install a cooling device such as
the ｇas cooler on the suction
side.
-
5
Area around the Pump
is
enclosed.
Make the ventilation available.
0.5.3
6
High temperature Please use it in environment
with the air conditioning
0.5.3
7
There is a leak in the pipe
connecting with the Pump.
Use a Leak detector or the like
to find out the leak position and
stop it.
3.3
8
The oil is not circulating.
a. Oil pit of the cover or
the like is clogged.
b. Oil distributor valve has
a trouble.
Conduct the overhaul.
a. Clean the oil pit.
b. Check and repair the oil
distributor valve.
5.4