Ulvac VD30C - Page 67

YK15-0009-DI-002-04
46
Trouble Causes Processing Method Reference
Oil leaks to
the outside
of the
Pump.
1
Deterioration of the O-ring
and/or oil seal of the Case
and Cover.
Conduct the overhaul. 5.4
2
Oil inlet is loose.
The drain port is
loosening.
Tighten again the oil inlet.
Re-tighten the drain port.
5
5.1
5.2
The motor
current
value is
abnormal.
1
Foreign substance entered
inside the Pump impaired
the Motor rotation.
Conduct the overhaul.
Removal of foreign substance
inside the Pump.
5.4
2
There is a leak in the pipe
connecting with the Pump.
Use a Leak detector or the like
to find out the leak position and
stop it.
3.3
3
Abnormal sliding of the
rotor and/or vane.
Conduct the overhaul. 5.4
4
Keeping continuous
operation under high
suction pressure.
Adjust the pressure. -
Lot of oil
mist blowing
out of the
Exhaust
outlet.
1
Pump is filled over the
specified volume.
Drain the oil until it gets the
specified volume.
3.2
5.2.1
5.2.2
2
Keeping continuous
operation under high
suction pressure
Put the oil mist trap on the
Exhaust side.
4.6
3 Oil mist trap is clogged. Replace the oil mist trap.
4.6
5.2.8
Initially,
performanc
e was being
satisfied,
but the
vacuum
degree
became
decreased.
1
Oil is dirty.
a. Water is being
suctioned.
b. Dust is being suctioned.
c. S
olvent vapor is being
suctioned
d. Foreign substance
enters in.
Replace with new oil.
Conduct
the overhaul.(Inside cleaning)
a. Put the trap into the front stage
of the Pump.
b. Put filters/traps into the front
stage of the Pump.
c. Put the trap by use application
into the front stage of
the
Pump.
d. Put filters into the front stage
of the Pump.
3.2
5.2.1
5.2.2