Rev. C
Dimension 3100 Manual
TOC-3
3.2.2 Axiom VT-102
. . . . . . . . . . . . . . . . . . . . . 3-3
3.2.3 Axiom IS3K-2
. . . . . . . . . . . . . . . . . . . . . . 3-4
3.3 Facilities Requirements
. . . . . . . . . . . . . . 3-5
3.4 Acoustic/Vibration Isolation Systems
. . . 3-6
3.4.1 Axiom IS3K-2 Dimensions, Utilities, and
Clearance
. . . . . . . . . . . . . . . . . . . . . . . . 3-6
3.4.2 Axiom VT-103-3K Dimensions, Utilities and
Clearance
. . . . . . . . . . . . . . . . . . . . . . . . 3-9
3.4.3 Axiom VT-102 Dimensions and Utilities
3-11
3.4.4 Computer/Controller Facility Requirements
3-12
3.4.5 ELCON Console
. . . . . . . . . . . . . . . . . . 3-13
3.5 Facilities Requirements Summary
. . . . 3-14
3.6 Environmental Acoustic/Vibration Speciļ¬cations
3-15
3.7 General Facilities Guidelines
. . . . . . . . 3-16
Chapter 4
Installation
4-1
4.1 Overview
. . . . . . . . . . . . . . . . . . . . . . . . . 4-1
4.2 Shipping and Receiving
. . . . . . . . . . . . . 4-2
4.2.1 Equipment Requirements
. . . . . . . . . . . . . 4-2
4.3 Uncrating the System
. . . . . . . . . . . . . . . 4-4
4.3.1 Uncrate the Dimension 3100 SPM System
4-4
4.4 Installing the Dimension 3100 System
. . 4-5
4.4.1 Install the Dimension 3100 SPM Unit
. . . 4-5
4.4.2 Install the Control Station
. . . . . . . . . . . . 4-7
4.5 Connecting the Dimension 3100 System
4-9
4.5.1 Connect the Dimension 3100 Control Station
Extensions
. . . . . . . . . . . . . . . . . . . . . . . . 4-9
4.5.2 Connect the Dimension 3100 Microscope
Extensions
. . . . . . . . . . . . . . . . . . . . . . . 4-15
4.6 System Power-up
. . . . . . . . . . . . . . . . . . 4-18
Chapter 5
Stage System
5-1
5.1 Overview
. . . . . . . . . . . . . . . . . . . . . . . . . 5-1
5.2 Mounting of Samples
. . . . . . . . . . . . . . . 5-2
5.2.1 Vacuum Chucks
. . . . . . . . . . . . . . . . . . . . 5-2
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