Zeiss BSD4 - Principle of Operation

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3.2. Principle of operation
Fig. 1.3: BSD4 detector diagram
• The primary electron beam travels through the objective lens and hits the
specimen (1).
• BSEs (2) are released from the specimen
• BSEs are detected by the diodes (five segments, 3) and generate an electrical
signal
The operation of the BSD4 detector is controlled via the BSD Control panel.
The BSD4 detector is inserted and retracted pneumatically.
1 Specimen 3 Top view on diodes (5 segments)
2 BSE trajectories
1
2
3