Zeiss BSD4 - Safety Summary; Intended Use

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2. Safety summary
2.1. Intended use
The BSD4 detector is an option to ZEISS FESEM models of the following series:
• MERLIN
®
• MERLIN
®
Compact
• MERLIN
®
VP Compact
• Crossbeam 340/540
• Crossbeam 360/560
The BSD4 detector is used to detect backscattered electrons.
The BSD4 detector is suitable to produce high quality material contrast (COMPO) and topographic
contrast (TOPO) images.
Using the BSD4 detector for any other purpose maybe dangerous and is not allowed.