Zeiss BSD4 - Technical Data; Product Identification; Specification; System Requirements

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3.3. Technical data

3.3.1. Product identification

3.3.2. Specification

3.4. System requirements

Requirements to run the BSD4 detector:

• SmartSEM

version 5.07 or higher

Workstation BSD4 detector Part no.

MERLIN

Compact

MERLIN

VP Compact

Crossbeam 340/540

BSD4 detector 349506-9016-000

Crossbeam 360/560 BSD4 detector (long version) 349506-9016-010

Feature Specification

Travel 4inch chamber: 200 mm

6inch chamber: 270mm

Travel speed 30-60 mm/s

Repeatability X-axis: ± 5 µm

Y-axis: ± 5 µm

Z-axis: ± 25 µm

Fine adjustment 4inch chamber:

X-axis: 4 mm

Y-axis: 9 mm

Z-axis: 13 mm

6inch chamber:

X-axis: ± 4 mm

Y-axis: ± 11 mm

Z-axis: ± 16 mm