Zeiss BSD4 - Selecting a BSD Mode

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The stage lowers to leave enough free space for
the BSD4 detector. The BSD4 detector moves in.
4 Go to the Detectors tab in the
SEM Control panel.
5 Select BSD4 A from the drop-down menu.
6 The software switches to the BSD4 detector
image.
5.2.2. Selecting a BSD mode
Preconditions:
• The BSD4 detector is inserted
Procedure:
1 Select an operation mode with the buttons.
a BSD: COMPO (1)
selects composition imaging.
b BSD:TOPO (2)
selects surface topography
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