Alcatel IPUP A100 - Page 45

B 40
2 / 2
Alcatel Vacuum Technology France --- IPUP A100 Instruction manual
Inert gas purge connection
(N
2
connection)
N2 FLOWRATE ADJUSTMENT
IPUP A100P only
Nitrogen needs to be used to reduce the concentration of pyrophoric
material to below the LEL.
The N
2
flow rate can be adjusted with the pressure regulator
depending on processes (see C 60).
Rear panel
N
2
purge
Pressure regulator
Manometer
G
B
0
0
5
2
7