Alcatel IPUP A100 - IPUP A100 Operating Principle

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Alcatel Vacuum Technology France --- IPUP A100 Instruction manual
IPUP A100 operating principle
DESIGN TO MINIMIZE
POTENTIEL RESIDUES
The equipment was designed to minimize potentiel residue deposits:
l by limiting the internal volumes that contain gas,
l by injecting N
2
purge on each pump stage to dilute the process
gas (P version only),
l by regulating the pump temperature and adjusting it to each
process in order to limit gas condensation (P version only),
l by integrating the silencer inside the pump to reduce by---product
deposition.
MULTI---STAGE PUMP WITH
ROOTS TECHNOLOGY
IPUP A100 pump consists of 5 Roots type stages.
The two rotors rotate without touching each other.
EXHAUST
INLET
Stage 5
High pressure stage
(exhaust stage)
Stage 4
Transfer stage
Stage 3
Transfer stage
Stage 2
Transfer stage
Stage 1
Low pressure stage
(inlet stage)
G
B
0
0
5
1
5