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Alcatel Vacuum Technology France --- IPUP A100 Instruction manual
IPUP A100 operating principle
TIGHTNESS WITH ENVIRONMENT
Tightness at low pressure side
The pump is fitted with ball bearings lubricated with fluorinated grease.
An overpressure zone is created around the bearing by injecting a
neutral gas.
The pressurization and the seals prevent pumped gases and powders
from migrating towards the bearings.
Neutral gas purging for the bearings is imperative for corrosive
processes.
Tightness at high pressure side
The bearings are lubricated by splashing oil.
The oil trap is sealed from stage 5 by a trap and a deflector.
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