Amtech Axpert-Eazy Series - Page 74

Amtech
6-28
6
No.
Parameter
Unit
Def
Min
Max
R
es
Description
WP
E505 RSF Time T2-
STP5
Sec 10.0 0.1 6000.0 0.1 Set time for Table-2, Step-5 for RSF function.
E506 RSF Time T2-
STP6
Sec 10.0 0.1 6000.0 0.1 Set time for Table-2, Step-6 for RSF function.
E507 RSF Time T2-
STP7
Sec 10.0 0.1 6000.0 0.1 Set time for Table-2, Step-7 for RSF function.
E508 RSF Time T2-
STP8
Sec 10.0 0.1 6000.0 0.1 Set time for Table-2, Step-8 for RSF function.
E509 RSF Time T2-
STP9
Sec 10.0 0.1 6000.0 0.1 Set time for Table-2, Step-9 for RSF function.
E510 RSF Time T2-
STP10
Sec 10.0 0.1 6000.0 0.1 Set time for Table-2, Step-10 for RSF function.
E511 RSF Time T2-
STP11
Sec 10.0 0.1 6000.0 0.1 Set time for Table-2, Step-11 for RSF function.
E512 RSF Time T2-
STP12
Sec 10.0 0.1 6000.0 0.1 Set time for Table-2, Step-12 for RSF function.
E513 RSF Time T2-
STP13
Sec 10.0 0.1 6000.0 0.1 Set time for Table-2, Step-13 for RSF function.
E514 RSF Time T2-
STP14
Sec 10.0 0.1 6000.0 0.1 Set time for Table-2, Step-14 for RSF function.
E515 RSF Time T2-
STP15
Sec 10.0 0.1 6000.0 0.1 Set time for Table-2, Step-15 for RSF function.
GROUP
-
6: RSF FREQUENCY FOR TABLE
-
3
E601 Freq T3-STP1 Hz 5.00 0.01 600 0.01 Set frequency for Table-3, Step-1.
E602 Freq T3-STP2 Hz 5.00 0.01 600 0.01 Set frequency for Table-3, Step-2.
E603 Freq T3-STP3 Hz 5.00 0.01 600 0.01 Set frequency for Table-3, Step-3.
E604 Freq T3-STP4 Hz 5.00 0.01 600 0.01 Set frequency for Table-3, Step-4.
E605 Freq T3-STP5 Hz 5.00 0.01 600 0.01 Set frequency for Table-3, Step-5.
E606 Freq T3-STP6 Hz 5.00 0.01 600 0.01 Set frequency for Table-3, Step-6.
E607 Freq T3-STP7 Hz 5.00 0.01 600 0.01 Set frequency for Table-3, Step-7.
E608 Freq T3-STP8 Hz 5.00 0.01 600 0.01 Set frequency for Table-3, Step-8.
E609 Freq T3-STP9 Hz 5.00 0.01 600 0.01 Set frequency for Table-3, Step-9.
E610 Freq T3-STP10 Hz 5.00 0.01 600 0.01 Set frequency for Table-3, Step-10.
E611 Freq T3-STP11 Hz 5.00 0.01 600 0.01 Set frequency for Table-3, Step-11.
E612 Freq T3-STP12 Hz 5.00 0.01 600 0.01 Set frequency for Table-3, Step-12.
E613 Freq T3-STP13 Hz 5.00 0.01 600 0.01 Set frequency for Table-3, Step-13.
E614 Freq T3-STP14 Hz 5.00 0.01 600 0.01 Set frequency for Table-3, Step-14.
E615 Freq T3-STP15 Hz 5.00 0.01 600 0.01 Set frequency for Table-3, Step-15.
GROUP
-
7: RSF TIME FOR TAB
LE
-
3
E701 RSF Time T3-
STP1
Sec 10.0 0.1 6000.0 0.1 Set time for Table-3, Step-1 for RSF function.
E702 RSF Time T3-
STP2
Sec 10.0 0.1 6000.0 0.1 Set time for Table-3, Step-2 for RSF function.
E703 RSF Time T3-
STP3
Sec 10.0 0.1 6000.0 0.1 Set time for Table-3, Step-3 for RSF function.
E704 RSF Time T3-
STP4
Sec 10.0 0.1 6000.0 0.1 Set time for Table-3, Step-4 for RSF function.