44
Installation and Operation Manual
X-DPT-Profibus-DP-Interface-eng
PN 541-C-068-AAG
November, 2008
2A 1 1/16" - 12SAE/MS (ONLY FOR 5853/63)
2B ½" TUBE COMPRESSION FITTINGS (ONLY FOR 5850/60/51/61/53/63)
2C 3/4" TUBE COMPRESSION FITTINGS (ONLY FOR 5853/63)
2D 1" TUBE COMPRESSION FITTINGS (ONLY FOR 5853/63)
2E ½" NPT(F) (ONLY FOR 5853/63)
2F 1" NPT(F) (ONLY FOR 5853/63)
2G 1½" NPT(F) (SEE OPTION "E") (ONLY FOR 5853/63/64)
2H ½" VCO (200 ln/min. max.) (ONLY FOR 5850/60/51/61/53/63)
2J 3/4" VCO (ONLY FOR 5853/63)
2K ½" VCR (200 ln/min. max.) (ONLY FOR 5850/60/51/61/53/63)
BROOKS MF-SERIES
SMART MASS FLOW METERS / CONTROLLERS
BASE MODEL NUMBER DESCRIPTION
MECHANICAL CONNECTIONS
2L DIN DN15PN40 (ONLY FOR MF53/63)
2M DIN DN25PN40 (ONLY FOR MF53/63)
2N DIN DN40PN40 (ONLY FOR MF53/63)
2O DIN DN50PN40 (ONLY FOR MF53/63)
2P ANSI ½" 150 LBS (ONLY FOR MF53/63)
2R ANSI ½" 300 LBS (ONLY FOR MF53/63)
2S ANSI 1" 150 LBS (ONLY FOR MF53/63)
2T ANSI 1" 300 LBS (ONLY FOR MF53/63)
2U ANSI 1½" 150 LBS (ONLY FOR MF53/63)
2V ANSI 1½" 300 LBS (ONLY FOR MF53/63)
2W ANSI 2" 150 LBS (ONLY FOR MF53/63)
2X ANSI 2" 300 LBS (ONLY FOR MF53/63)
2Y 1" VCO (ONLY FOR 5853/63)
2Z 3/4" VCR (ONLY FOR 5853/63)
3A 2"NPT (SEE OPTIONS B) (MF5864 ONLY)
3B ANSI 3" - 150 LBS (MF5864 ONLY)
3C ANSI 3" - 300 LBS (MF5864 ONLY)
3D ANSI 3" - 600 LBS [2D] (MF5864 ONLY)
3E DIN DN80 - PN40 [2D] (MF5864 ONLY)
3F DIN DN80 - PN64 [2D] (MF5864 ONLY)
3G DIN DN80 - PN100 (MAX. 85 BAR) [2D] (MF5864 ONLY)
4A ANSI 4" - 150 LBS (MF5864 ONLY)
4B ANSI 4" - 300 LBS (MF5864 ONLY)
4C ANSI 4" - 600 LBS [2D] (MF5864 ONLY)
4D DIN DN100 - PN16 [2D] (MF5864 ONLY)
4E DIN DN100 - PN40 [2D] (MF5864 ONLY)
4F DIN DN100 - PN64 [2D] (MF5864 ONLY)
5A 6" ANSI - 150 LBS [2D] (MF5864 ONLY)
5B 6" ANSI - 300 LBS [2D] (MF5864 ONLY)
5C 6" ANSI - 600 LBS [2D] (MF5864 ONLY)
5D DIN DN 150 - PN 16 [2D] (MF5864 ONLY)
5E DIN DN 150 - PN 40 [2D] (MF5864 ONLY)
5F DIN DN 150 - PN 64 [2D] (MF5864 ONLY)