Brooks 5850S - Page 43

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Installation and Operation Manual
X-DPT-Profibus-Interface-eng
PN 541-C-068-AAG
November, 2008
BROOKS MF-SERIES
SMART MASS FLOW METERS / CONTROLLERS
BASE MODEL NUMBER DESCRIPTION
MF60S/AA MASS FLOW METER; F.S. FLOWRANGES: 0.003 - 0.008 ln/min.
MF60S/AC MASS FLOW METER; F.S. FLOWRANGES: 0.008 - 30 ln/min.
MF61S/AD MASS FLOW METER; F.S. FLOWRANGES: 20 - 100 ln/min.
MF63S/AE MASS FLOW METER; F.S. FLOWRANGES: 100 - 200 ln/min.
MF63S/AF MASS FLOW METER; F.S. FLOWRANGES: 200 - 300 ln/min.
MF63S/AG MASS FLOW METER; F.S. FLOWRANGES: 300 - 400 ln/min.
MF63S/AH MASS FLOW METER; F.S. FLOWRANGES: 400 - 500 ln/min.
MF63S/AJ MASS FLOW METER; F.S. FLOWRANGES: 500 - 600 ln/min.
MF63S/AK MASS FLOW METER; F.S. FLOWRANGES: 600 - 700 ln/min.
MF63S/AL MASS FLOW METER; F.S. FLOWRANGES: 700 - 800 ln/min.
MF63S/AM MASS FLOW METER; F.S. FLOWRANGES: 800 - 900 ln/min.
MF63S/AN MASS FLOW METER; F.S. FLOWRANGES: 900 - 1000 ln/min.
MF64S/AO MASS FLOW METER; F.S. FLOWRANGES: 18 - 80 m3n/h. (1,5")
MF64S/AP MASS FLOW METER; F.S. FLOWRANGES: 60 - 140 m3n/h. (2")
MF64S/AR MASS FLOW METER; F.S. FLOWRANGES: 140 - 320 m3n/h. (3")
MF64S/AS MASS FLOW METER; F.S. FLOWRANGES: 240 - 540 m3n/h. (4")
MF64S/AT MASS FLOW METER; F.S. FLOWRANGES: 540 - 1250 m3n/h. (6") [2D]
MF64S/AU MASS FLOW METER; F.S. FLOWRANGES: 970 - 2160 m3n/h. (8") [2D]
MF50S/AA MASS FLOW CONTROLLER; F.S. FLOWRANGES: 0.003 - 0.008 ln/min.
MF50S/AC MASS FLOW CONTROLLER; F.S. FLOWRANGES: 0.008 - 30 ln/min.
MF51S/AD MASS FLOW CONTROLLER; F.S. FLOWRANGES: 20 - 100 ln/min.
MF53S/AE MASS FLOW CONTROLLER; F.S. FLOWRANGES: 100 - 200 ln/min.
MF53S/AF MASS FLOW CONTROLLER; F.S. FLOWRANGES: 200 - 300 ln/min.
MF53S/AG MASS FLOW CONTROLLER; F.S. FLOWRANGES: 300 - 400 ln/min.
MF53S/AH MASS FLOW CONTROLLER; F.S. FLOWRANGES: 400 - 500 ln/min.
MF53S/AJ MASS FLOW CONTROLLER; F.S. FLOWRANGES: 500 - 600 ln/min.
MF53S/AK MASS FLOW CONTROLLER; F.S. FLOWRANGES: 600 - 700 ln/min.
MF53S/AL MASS FLOW CONTROLLER; F.S. FLOWRANGES: 700 - 800 ln/min.
MF53S/AM MASS FLOW CONTROLLER; F.S. FLOWRANGES: 800 - 900 ln/min.
MF53S/AN MASS FLOW CONTROLLER; F.S. FLOWRANGES: 900 - 1000 ln/min.
MECHANICAL CONNECTIONS
1A WITHOUT ADAPTORS (9/16"-18" UNF) (ONLY FOR 5850/60/51/61/53/63)
1B 1/4" TUBE COMPRESSION FITTINGS (ONLY FOR 5850/60/51/61)
1C 1/8" TUBE COMPRESSION FITTINGS (ONLY FOR 5850/60/51/61)
1D 3/8" TUBE COMPRESSION FITTINGS (ONLY FOR 5851/61)
1E 1/4" VCR (ONLY FOR 5850/60/51/61)
1F 1/4" VCO (ONLY FOR 5850/60/51/61)
1G 1/4" NPT (ONLY FOR 5850/60/51/61)
1H 6mm TUBE COMPRESSION FITTINGS (ONLY FOR 5850/60/51/61)
1J 10mm TUBE COMPRESSION FITTINGS (ONLY FOR 5850/60/51/61)
1K 1/4" BSP (F) (ONLY FOR 5850/60/51/61)
1Y ½" BSP (F) (ONLY FOR 5853/63)
1Z 1" BSP (F) (ONLY FOR 5853/63)
Modellisting Model MF Series