Models 5800-S
Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
29
Gasname Formula Gasfactor Orifice factor Density (kg/m3)
Acetylene (Ethyne) C2H2 0,615 0,97 1,173
Air Mixture 0,998 1,018 1,293
Allene C3H4 0,478 1,199 1,787
Ammonia NH3 0,786 0,781 0,771
Argon Ar 1,395 1,195 1,784
Arsine AsH3 0,754 1,661 3,478
Boron Trichloride BCL3 0,443 2,044 5,227
Boron Trifluoride BF3 0,579 1,569 3,025
Bromine Pentafluoride BrF5 0,287 2,502 7,806
Bromine Trifluoride BrF3 0,439 2,214 6,108
Bromotrifluoroethylene C2BrF3 0,326 2,397 7,165
Bromotrifluoromethane (f-13B1) CBrF3 0,412 2,303 6,615
1,3-Butadiene C4H6 0,354 1,413 2,491
Butane C4H10 0,257 1,467 2,593
1-Butene C4H8 0,294 1,435 2,503
CIS-2-Butene C4H8 0,32 1,435 2,503
Trans-2-Butene C4H8 0,291 1,435 2,503
Carbon Dioxide CO2 0,74 1,255 1,977
Carbon Disulfide CS2 0,638 1,65 3,393
Carbon Monoxide CO 0,995 1 1,25
Carbon Tetrachloride CCL4 0,344 2,345 6,86
Carbon Tetrafluoride (f-14) CF4 0,44 1,77 3,926
Carbonyl Fluoride COF2 0,567 1,555 2,045
Carbonyl Sulfide COS 0,68 1,463 2,68
Chlorine CL2 0,876 1,598 3,214
Chlorine Dioxide CLO2 0,693 1,554 3,011
Chlorine Trifluoride CLF3 0,433 1,812 4,125
Chlorodifluoromethane (f-22) CHCLF2 0,505 1,77 3,906
Chloroform (Trichloromethane) CHCL3 0,442 2,066 5,34
Chloropentafluoroethane (f-115) C2CLF5 0,243 2,397 7,165
Chlorotrifluoroethylene C2CLF3 0,337 2,044 5,208
Chlorotrifluoromethane (f-13) CCLF3 0,43 1,985 4,912
2-Chlorobutane C4H9CL 0,234 1,818 4,134
Cyanogen (CN)2 0,498 1,366 2,322
Cyanogen Chloride CLCN 0,618 1,48 2,73
Cyclobutane C4H8 0,387 1,413 2,491
Cyclopropane C3H6 0,505 1,224 1,877
Deuterium D2 0,995 0,379 0,177
Diborane B2H6 0,448 1 1,235
Diboromodifluoromethane (f-12B2) CBr2F2 0,363 2,652 8,768
1,2-Dibromotetrafluoroethane (f-114B2) C2Br2F4 0,215 2,905 10,53
Dichlorodifluoromethane (f-12) CCL2F2 0,39 2,099 5,492
Dichlorofluoromethane (f-21) CHCL2F 0,456 1,985 4,912
Dichlorosilane SiH2CL2 0,442 1,897 4,506
Diedthylsilane C4H12Si 0,183 1,775 3,94
2,2 Dichloro- 1,1,1- Trifloroethane C2HCL2F3 0,259 2,336 6,829
1,2-Dichloroethane (Ethylene dichloride) C2H4CL2 0,382 1,879 4,419
1,2-Dichlorotetrafluoroethane (f-114) C2CL2F4 0,231 2,449 7,479
1,1-Difluoro-1-Chloroethane C2H3CLF2 0,341 1,957 4,776
1,1-Difluoroethane CH3CHF2 0,415 1,536 2,94
1,1-Difluoroethylene CH2:CF2 0,458 1,512 2,86
Difluoromethane (f-32) CF2H2 0,627 1,36 2,411
Appendix A
Gas Conversion Table
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