Brooks Smart Series User Manual

Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
Models 5800-S
30
Dimethylamine (CH3)2NH 0,37 1,269 2,013
Dimethylether (CH3)2O 0,392 1,281 2,055
2,2-Dimethylpropane C(CH3)4 0,247 1,613 3,244
Disilane Si2H6 0,332 1,493 2,779
Ethane C2H6 0,49 1,038 1,357
Ethanol C2H6O 0,394 1,282 2,057
Ethylacetylene C4H6 0,365 1,384 2,388
Ethyl Chloride C2H5CL 0,408 1,516 2,879
Ethylene C2H4 0,619 1 1,261
Ethylene Oxide C2H4O 0,589 1,254 1,965
Fluorine F2 0,924 1,163 1,695
Fluoroform (f-23) CHF3 0,529 1,584 3,127
Germane GeH4 0,649 1,653 3,418
Germanium Tetrachloride GeCL4 0,268 2,766 9,574
Halothane C2HBrCLF3 0,257 2,654 8,814
Helium He 1,386 0,378 0,178
Hexafluoroacetone C3F6O 0,219 2,434 7,414
Hexafluorobenzine C6F6 0,632 2,577 8,309
Hexafluoroethane (f-116) C2F6 0,255 2,219 6,139
Hexafluoropropylene (HFP) C3F6 0,249 2,312 6,663
Hexamethyldisilane (HMDS) (CH2)6Si2 0,139 2,404 7,208
Hexane C6H14 0,204 1,757 3,847
Hydrogen H2 1,008 0,269 0,09
Hydrogen Bromide HBr 0,987 1,695 3,645
Hydrogen Chloride HCL 0,983 1,141 1,639
Hydrogen Cyanide HCN 0,744 0,973 1,179
Hydrogen Fluoride HF 0,998 0,845 0,893
Hydrogen Iodide HI 0,953 2,144 5,789
Hydrogen Selenide H2Se 0,837 1,695 3,613
Hydrogen Sulfide H2S 0,85 1,108 1,539
Iodine Pentafluoride IF5 0,283 2,819 9,907
Isobutane C4H10 0,26 1,44 2,596
Isobutene C4H8 0,289 1,435 2,503
Isopentane C5H12 0,211 1,605 3,222
Krypton Kr 1,382 1,729 3,708
Methane CH4 0,763 0,763 0,717
Methylacetylene C3H4 0,473 1,196 1,782
Methyl Bromide CH3Br 0,646 1,834 4,236
3-Methyl-1-butene C5H10 0,252 1,584 3,127
Methyl Chloride CH3CL 0,687 1,347 2,308
Methyl Fluoride CH3F 0,761 1,102 1,518
Methyl Mercaptan CH4S 0,588 1,313 2,146
Methyl Silane CH6Si 0,393 1,283 2,061
Methyl Trichlorosilane CH3CL3Si 0,267 2,31 6,675
Methyl Vinyl Ether C3H6O 0,377 1,435 2,567
Monoethyanolamine C2H7NO 0,305 1,477 2,728
Monoethylamine (CH3CH2NH2) C2H7 0,359 1,269 2,013
Monomethylamine CH3NH2 0,565 1,067 1,42
Neon Ne 1,398 0,847 0,902
Nickel Carbonyl Ni(CO)4 0,212 2,371 7,008
Nitric Oxide NO 0,995 1,03 1,339
Nitrogen N2 1 1 1,251
Gas Conversion Table (continued)
Appendix A
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Brooks Smart Series Specifications

General

Category	Measuring Instruments
Communication Protocol	RS-485, Modbus
Power Supply	24 VDC
Operating Temperature	0 to 50°C
Storage Temperature	-20 to 70°C