Models 5800-S
Installation and Operation Manual
X-TMF-5800S-MFC-eng
PN 541-C-051-AAG
November, 2008
31
Nitrogen Dioxide NO2 0,758 1,713 2,052
Nitrogen Trifluoride NF3 0,501 1,598 3,168
Nitrogen Trioxide N2O3 0,443 1,649 3,389
Nitrosyl Chloride NOCL 0,644 1,529 2,913
Nitrous Oxide N2O 0,752 1,259 1,964
Octofluorocyclobutane C4F8 0,169 2,672 8,933
Oxygen O2 0,988 1,067 1,429
Oxygen Difluoride OF2 0,672 1,388 2,402
Ozone O3 0,738 1,31 2,138
Perchloryl Fluoride CLO3F 0,448 1,905 4,571
Perfluorobutane C4F10 0,738 2,918 10,61
Perfluoro-2-Butene C4F8 0,268 2,672 8,933
Perfluoromethyl-vinylether (PMVE) PMVE 0,296 2,029 5,131
Perfluoropropane C3F8 0,179 2,591 8,396
Pentane (n-Pentane) C5H12 0,212 1,605 3,222
Pentafluoroethane C2HF5 0,287 2,07 5,36
Phosgene COCL2 0,504 1,881 4,418
Phosphine PH3 0,783 1,1 1,517
Phosphorous Pentafluoride PF5 0,346 2,109 5,62
Phosphorous Trifluoridide PF3 0,495 1,77 3,906
Propane (same as CH3CH2CH3) C3H8 0,343 1,274 2,008
Propylene (Propene)* C3H6 0,401 1,234 1,875
Rhenium Hexafluoride ReF6 0,23 3,279 13,41
Silane SiH4 0,625 1,07 1,44
Silicon Tetrachloride SiCL4 0,31 2,462 7,579
Silicon Tetrafluoride SiF4 0,395 1,931 4,648
Sulfur Dioxide SO2 0,728 1,529 2,858
Sulfur Hexafluoride SF6 0,27 2,348 6,516
Sulfur Tetrafluoride SF4 0,353 1,957 4,776
Sulfur Trioxide SO3 0,535 1,691 3,575
Sulfuryl Fluoride SO2F2 0,423 1,931 4,648
Tetrachloromethane CCL4 0,344 2,345 6,858
Tetrafluoroethylene (TFE) C2F4 0,361 1,905 4,526
Tetrafluorohydrazine N2F4 0,367 1,926 4,624
Trichlorofluoromethane (f-11) CCL3F 0,374 2,244 6,281
Trichlorosilane SiHCL3 0,329 2,201 6,038
Trimethyloxyborane (TMB) B(OCH3)3 0,3 1,929 4,638
1,1,2-Trichloro-1,1,2-Triflouroet (f-113) C2CL3F3 0,231 2,52 7,92
Trimethylamine (CH3)3N 0,316 1,467 2,639
Tungsten Hexafluoride WF6 0,227 3,264 13,28
Uranium Hexafluoride UF6 0,22 3,548 15,7
Vinyl Bromide C2H3Br 0,524 1,985 4,772
Vinyl Chloride C2H3CL 0,542 1,492 2,788
Vinyl Fluoride C2H3F 0,576 1,281 2,046
Water Vapor H2O 0,861 0,802 0,804
Xenon Xe 1,383 2,18 5,851
Gas Conversion Table (continued)
Appendix A
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