EBARA EV-S100P - Page 69

P.50
Fig. 4.6
15 Pin D Sub-Miniature Female Receptacle
(As seen from connecting side)
Table 4.7 Control Connector Pin Assignment
(CN-Z: In accordance with SEMI-E73)
Pin. No.
Signal name
I/O
Signal type
1 MP START (+) IN Run:CLOSE, Alternate
2 BP START (+) IN Run:CLOSE, Alternate
3 MP START STATUS (+) OUT Run:CLOSE, Alternate
4 BP START STATUS (+) OUT Run:CLOSE, Alternate
5 WARNING STATUS (+) OUT WARNING:OPEN, Alternate
6 ALARM STATUS (+) OUT ALARM:OPEN, Alternate
7 REMOTE STATUS (+) OUT REMOTE: CLOSE
8 −
9
MP START (−)
10 BP START (−)
11 MP START STATUS (−)
12 BP START STATUS (−)
13 WARNING STATUS (−)
14 ALARM STATUS (−)
15 REMOTE STATUS (−)
1
8
15
9
Screw lock size: M2.6
Contact pin surface: Au
PM10U
EBARA
CORPORATION