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Edwards EDS 300

Edwards EDS 300
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Figure 10 Schemac for purge gas and switches - EDS pump with air cooling
PG-1
PR-1
BoV-2
TS-4
CS/4043/A
TS-1 TS-2
Purge gas
Needle valve
Process IN
Exhaust
Fan
motor
High-vacuum shaft seal
Balance line
Low vacuum shaft seal
Motor
Mechanical
water pump
Heat
exchanger
Gas ballast
Gas ballast
PG-1 Pressure gauge purge gas
PR-1 Pressure regulator purge gas
BoV-1 Blow o valve
TS-1 Pump body thermal snap switch, warning
TS-2 Pump body thermal snap switch, trip
TS-4 Motor thermistor
Flow restrictor
Non-return valve
Page 30
A41802880_C - Installaon

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