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EH - ES direct mount assembly procedure
A352-02-840 Issue A
4.4 Leak test the system
Leak test the system after installation is complete and seal any leaks found. Hazardous substances which leak from
the system will be dangerous to people and there will be a danger of explosion if air leaks into the system.
Edwards recommend that the leak rate is 1 x 10
-3
mbar l s
-1
(1 x 10
-1
Pa l s
-1
) helium or less.
Leak test the system after installation is complete and seal any leaks found to prevent leakage of
hazardous substances out of the system and leakage of air into the system.