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Contents
A533-23-880 Issue C
Tables
Table Page
1 Safety sensors ...........................................................................................................15
2 Explanation of menu buttons .........................................................................................15
3 Explanation of LED’s ...................................................................................................16
4 Technical Data ..........................................................................................................19
5 Full load current ratings ...............................................................................................25
6 Nitrogen Purge flow rates: High gas configuration ................................................................26
7 Electrics box default setpoints .......................................................................................27
8 Electrics module default setpoints ...................................................................................28
9 Gas module default setpoints: High gas configuration ............................................................28
12 Checklist of components ...............................................................................................33
13 Pins in the iF Tool Interface Module connector plug ..............................................................45
14 Pins in the electrical supply connector ..............................................................................48
15 Menu structure ..........................................................................................................54
16 Configuration store nominal gas flow ................................................................................81
17 Status menu sensor reading displays .................................................................................86
18 Fit and re-tighten a tube fitting ......................................................................................92
19 Warning messages .................................................................................................... 103
20 Alarm messages ....................................................................................................... 107
21 Fault messages ........................................................................................................ 109
22 Fault parameters ..................................................................................................... 110
23 Fault types ............................................................................................................. 110
Associated publications
Publication title Publication number
Vacuum pump and vacuum system safety P400-40-100
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