4. Preload check
WARNING:
Allow the pump r
otor to stop before you remove the pump from your vacuum system
for maintenance procedures.
NOTICE:
If the pump has suer
ed any damage (i.e. the rotor does not spin freely or quietly), it
is recommended that the service is not carried out. Contact local service centre for
advice.
Ensure all tools are clean and free of dirt and grease to avoid contaminaon of the
rotor.
Aer the bearing change the bearing preload must be checked. To become familiar with
how to check bearing preload, we recommend you perform a check at rst.
Preload is the process where a permanent thrust load is applied to the mechanical
bearing. Thrust is applied by the misalignment between the inner stac and the outer
rotang passive magnec bearing located at the inlet of the pump.
Place the pump in the vercal posion.
Figure 3 Check the bearing preload
1. Adjuster leg 2. Bearing adjuster nut1. Adjuster leg 2. Bearing adjuster nut
Place the preload tool onto the inlet of the turbomolecular pump. The force probe must
be loca
ted in the centre of the pump inlet with the adjuster legs engaged on the
06/2021 - ©Edwards Limited
Page 10300872820_002_C2
B8J203880_C
300872820_002_C2 - Preload check
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