STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page viii
PAGE
viii
TABLES
Table Title Page
1 Environmental requirements for installation 20
2 Eye nut size 23
3 Pump functions 27
4 Control unit front panel functions 30
5 Control unit front panel functions (continued) 31
6 Tightening torque of bolt 35
7 Maximum torque predicted and recommended securing bolt
for inlet port flange 36
8 Power cable 40
9 Starting/stopping the STP pump (X2 REMOTE) 54
10 Reset Operation (X2 REMOTE) 55
11 LED Indications for each state 56
12 X2 REMOTE input signal pins 61
13 X2 REMOTE input signal pins (continued) 63
14 Input operation port setting 65
15 Rotation INHIBIT signal input 62
16 X3 pin position 68
17 Communication parameters 71
18 Input operation port 72
19 Serial communication time out setting 73
20 Transmission control characters 78
21 Pump operation commands 86
22 Command list 91
23 Pump operation commands 93
24 Error message values 95
25 Error message values (continued) 96
26 Pump operation mode 98
27 Remote mode 103
28 Warning value bit assign 107
29 Parameter setting value 112
30 Option function number and parameter list 122
31 Option function number and parameter list 124
32 Warning value bit assign 127
33 States of LEDs and X2 REMOTE output signals at power failure130
34 WARNING function 132
35 Default setting of WARNING function 136
36 Factory Setting and Variable Range 136
37 Priority of failure signal 138
38 Error List 139
39 Error List (continued) 140
40 Error List (continued) 141
41 Error List (continued) 142
42 Error List (continued) 143
43 Troubleshooting with no indication of the "FAILURE" LED 144
To Next Page
Loading...
Need help?
General
