Edwards STP-iS2207C User Manual

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 107
5
SERIAL COMMUNICATION PROTOCOL
Bit Warning message 16-bits hex value
0 [System reservation]
0001
1
WARNING: Second Damage Limit 0002
2
WARNING: First Damage Limit 0004
3
WARNING: Imbalance X_H 0008
4
WARNING: Imbalance X_B 0010
5
WARNING: Imbalance Z 0020
6
WARNING: Pump Run Time Over 0040
7
WARNING: Pump Overload 0080
8
[System reservation] 0100
9
[System reservation] 0200
10
[System reservation] 0400
11
[System reservation] 0800
12
[System reservation] 1000
13
[System reservation] 2000
14
WARNING: Other Warning
*1
4000
15
[System reservation] 8000
*1
FAN Warning or C/U Restart
Table 28 - Warning value bit assign

Edwards STP-iS2207C Specifications

General

Brand	Edwards
Model	STP-iS2207C
Category	Water Pump
Language	English