Edwards STP-iS2207C - 2.3 Water Cooling Use Condition

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 13
TECHNICAL DATA
2
2.3 Water cooling use condition
Use cooling water which fulfills the following conditions.
Item Specification
Port type Rc 1/4 (Female)
Flow rate L/min 3
Water temperature °C 15 to 35
*1
Water pressure MPa (kgf/cm
2
) 0.3 (3)
Maximum grain size mm
2
0.03
pH 6.5 to 8.0
Water hardness mg/L 100
Resistivity
kΩ･cm
4 to 1000
Turbidity FNU < 30
*1
Maximum gas flow-rate differs according to the cooling water
temperature. (refer to Section 2.2)