STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page
13
TECHNICAL DATA
2
2.3 Water cooling use condition
Use cooling water which fulfills the following conditions.
Item Specification
Port type
Rc 1/4 (Female)
Flow rate
L/min
3
Water temperature °C
15 to 35
*1
Water pressure MPa (kgf/cm
2
)
0.3 (3)
Maximum grain size mm
2
0.03
pH
6.5 to 8.0
Water hardness mg/L
100
Resistivity
kΩ･cm
4 to 1000
Turbidity FNU
< 30
*1
Maximum gas flow-rate differs according to the cooling water
temperature. (refer to Section 2.2)
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