Edwards STP-iS2207C - 2 Technical Data; 2.1 STP Pump Specifications

STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 11
TECHNICAL DATA
2
2 TECHNICAL DATA
2.1 STP pump specifications
The values shown below are typical. They are not guaranteed.
Item STP-iS2207 / STP-iS2207C
Flange size Inlet port flange VG200 / ISO200F
ICF253
VG250 / ISO250F
ICF305
Outlet port flange KF40
Pumping speed N
2
L/s 1,850 2,200
Ar L/s 1,650 2,000
H
2
L/s 700 750
Compression ratio Ar 1×10
7
H
2
2.5×10
2
Ultimate pressure Pa (Torr) 10
-6
(10
-8
) [after baking]
Allowable backing pressure Pa (Torr) 200 (1.5)
Rated speed rpm 36,500
Backup rotational speed
*1
rpm Approximately 6,000
Starting time min
≦8
Stopping time min
≦9
Noise dB < 55 (at 36,500 rpm)
Baking temperature °C <120
Lubricating oil Not necessary
Installation position Free
Cooling method Water cooling
Mass
*2
kg 45
Ambient temperature range °C 0 to 40
Storage temperature range °C -25 to 55
*1
A backup rotational speed is the lowest rotational speed to which the magnetic bearing can be backed up at a power failure.
*2
Mass is a value of state that the only standard accessory was installed (except the optional accessory).