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Edwards STP-iS2207C

Edwards STP-iS2207C
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STP-iS2207 Series Turbomolecular Pump
MT-89E-001-C
Page 121
5
SERIAL COMMUNICATION PROTOCOL
Parameter
6a 6b 6c 6d
ASCII
F
F
0
0
0
0
0
0
0
0
0
0
0
0
*1
*1
*1
*1
*1
*1
HEX
46
46
30
30
30
30
30
30
30
30
30
30
30
30
Parameter
7a 7b
[Omitted]
21d
ASCII
F
F
0
0
0
0
*1
*1
*1
*1
*1
*1
HEX
46
46
30
30
30
30
Parameter
22a 22b 22c 22d
ASCII
F
F
0
0
0
0
0
0
0
0
0
0
0
0
*1
*1
*1
*1
*1
*1
HEX
46
46
30
30
30
30
30
30
30
30
30
30
30
30
*1 System reservation

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