STP-iXR1606 Turbomolecular Pump
MT-79E-001-D
Page 98
5
SERIAL COMMUNICATION PROTOCOL
Error message Value Error message Value
[System reservation] 66 [System reservation] 80
[System reservation] 67 [System reservation] 81
[System reservation] 68 [System reservation] 82
[System reservation] 69 [System reservation] 83
[System reservation] 70 [System reservation] 84
[System reservation] 71 [System reservation] 85
Aberrant Brake 72 [System reservation] 86
Aberrant Accel 73 [System reservation] 87
[System reservation] 74 Overspeed 4 88
[System reservation] 75 [System reservation] 89
Inordint Current 76 CNT Overheat 3 90
[System reservation] 77 WARNING: Pump Run Time Over 91
Serial Com. Fail 78 WARNING: Pump Overload 92
[System reservation] 79
Table 29 - Error message values (continued)
*1 CAUTION or WARNING message. It is not a state of failure. Refer to Section 7 for details. The STP pump will continue to
operate after one of these messages is displayed. It is recommended that an application be designed with this in
consideration.
*2 Functions only with TMS specification
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