Edwards STP-L301 Series

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STP-L301/L451 Series Instruction Manual

5-5

Installation

高温部

やけどします。

触らないでくだ

さい。

Can burn hands

D0 not touch.

警告

WARNING

Hot surface

Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater

◇ The air-cooling unit and water cooling unit become vibration sources.

Main Page

Limited Warranty9
Table of Contents11
Precautions for Safe Operation of the STP Pump17
Usable Gases17
Precautions on Maintenance and Inspection17
Labels18
Operation Principle of the STP Pump21
Figure2.1 Cross Sectional View of the STP Pump22
Unpacking23
Unpacking the STP Pump and the STP Control Unit23
Accessories23
Table 3.1 Accessories23
Table 3.2 Accessories for Chemical Specific Pump (Type C)23
Installation of the STP Pump25
Name and Function of each Part25
Figure 4.1 Configuration of the STP Pump26
Precautions before Installation27
Operating Environment27
Installation Area28
Bench28
How to Install the STP Pump29
Figure 4.2 Installation of the STP Pump to the Vacuum Equipment29
Cleaning the Seal30
STP Pump Installation Positions31
Figure 4.3 STP Pump Installation Positions31
How to Secure the STP Pump32
Table 4.1 Tightening Torque of Bolt32
Table 4.2 Maximum Torque Predicted and Recommended Securing Bolt for Inlet Port Flange33
Figure 4.5 Example of Securing the STP Pump33
When Securing the Inlet Port with Bolts33
Table 4.3 Number of Claw Clamps by Size of Flange34
Figure 4.6 Example of Securing the STP Pump (When Securing the Inlet Port Flange with Claw Clamps)34
Figure 4.7 Example of Securing the STP Pump (When Installing the Damper in the Inlet Port Flange)35
Vacuum Piping36
Connecting the Ground Cable37
Connecting the Purge Port (for the Chemical Specific Pump, Type C)38
Figure 4.8 Connecting the Purge Port38
Baking, Cooling the STP Pump and Gas Pumping39
Baking the STP Pump39
Attaching a Baking Heater39
Cooling the STP Pump40
Water Cooling Method40
Air Cooling Method41
Gas Suction42
How to Introduce a Purge Gas [For Chemical Specific Pump (Type C)]42
Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater43
Installation of the STP Control Unit45
Name and Function of each Part45
Front Panel45
Figure 6.1 STP Control Unit Front Panel46
Rear Panel47
Figure 6.2 STP Control Unit Rear Panel48
Top Panel49
Figure 6.3 STP Control Unit Top Panel49
Side Panel (Left Side)50
Figure 6.4 STP Control Unit Side Panel (Left Side)50
Precautions before Installation51
Operating Environment51
Insulation Test51
Installation Area52
Figure 6.5 Peripheral Spaces of the STP Control Unit52
Attaching the STP Control Unit Front Panel to a Rack53
Figure 6.6 Example of Securing the STP Control Unit53
Cable Connection54
Name and Dimensions of each Cable54
Figure 6.7 External Dimensions of Ground Cable54
Figure 6.8 External Dimensions of STP Connection Cable54
Figure 6.9 External Dimensions of STP Connection Cable55
How to Connect the Cables56
Table 6.1 Connecting the Power Cable57
Figure 6.10 Connecting Method of the AC Power Cable57
Figure 6.11 How to Secure the Power Cable58
Connecting to Semiconductor Equipment59
Connecting to Power59
Emergency off Circuit (EMO Circuit)59
How to Start/Stop the STP Pump61
Before Starting61
Start Procedures62
Stop Procedures62
Manual Operation63
Powering on63
Starting the STP Pump63
Stopping the STP Pump63
Starting the STP Pump after Stopping64
Powering off64
Starting the STP Pump after a Safety Function Operates64
Remote Operation (I/O TB2)65
Powering on65
Starting/Stopping the STP Pump65
Starting the STP Pump after Stopping65
Table 7.1 Starting/Stopping the STP Pump During Remote Operation (I/O TB2)65
Powering off66
Starting the STP Pump after a Safety Function Operates66
Table 7.2 Reset Operation During Remote Operation (I/O TB2)66
Remote Operation (CON4: Optional Accessory)67
Powering on67
Starting/Stopping the STP Pump67
Starting the STP Pump after Stopping67
Table 7.3 Starting/Stopping the STP Pump During Remote Operation (CON4)67
Powering off68
Starting the STP Pump after a Safety Function Operates68
Table 7.4 Reset Operation During Remote Operation (CON4)68
Figure 7.1 STP Pump Operation Procedures69
Remote Input/Output Signal Terminal Blocks71
I/O TB1 Terminal Block71
Table 8.1 I/O TB1 Terminal Block71
Figure 8.1 I/O TB1 Remote Output Signal Terminal Block73
I/O TB2 Terminal Block75
Table 8.4 I/O TB2 Terminal Block75
Figure 8.2 I/O TB2 Remote Input Signal Terminal Block76
CON4 Connector (Optional Accessory)77
Remote Input Signals77
Table 8.5 CON4 Connector (Remote Input Signal)77
Figure 8.3 CON4 Remote Input Signal Connector78
Remote Output Signals79
Table 8.7 con 4 Connector (Remote Output Signal)79
Figure 8.4 CON4 Remote Output Signal Connector80
Remote Cables (Optional Accessories)81
Table 8.9 Remote Cable Connections (Single-Side Connector Type)81
Adjustment Method83
Tuning83
Tuning Method83
Figure 9.1 Tuning Procedures84
Setting the Rated Speed85
When Setting DSW-B No.1 to on under Power-ON State85
When Setting DSW-B No.1 to on before Powering on86
Figure 9.2 LCD Message in Rated Speed Setting Mode87
10 Safety Functions89
Table 10.1 States of Leds and REMOTE Output Signals at Power Failure90
Table 10.2 Operations of the STP Pump after Power Recovery90
Table 10.3 Safety Functions92
Table 11.1 Error Messages97
Table 11.2 Troubleshooting after Powering on101
Table 11.3 Troubleshooting When Performing the STP Pump Start Operation101
Table 11.4 Troubleshooting While the STP Pump Is Rotating102
Table 11.5 Recommended Spare Parts104
Table 11.6 Cleaning and Decontamination105
Table 13.1 Specifications of the STP Pump111
Figure 13.1 External Appearance of the STP Pump STP (STP-L301: ISO100)112
Figure 13.2 External Appearance of the STP Pump (STP-L451: ISO160)113
Figure 13.3 Label Affixing Position for the STP Pump114
Table 13.2 Specifications of the STP Control Unit115
Figure 13.4 External Appearance of the STP Control Unit117
Figure 13.5 Label Affixing Positions for the STP Control Unit118

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